
Advanced Wafer Cassette ASRS Solutions
Automate the Buffer. Protect the Yield.

UB Wafer Cassette ASRS is a high-performance automated storage system designed for the secure management of semiconductor cassettes. We utilize a Class 1k certified environment to protect delicate wafers from contamination, ensuring that every unit is stored under optimal conditions to maintain material integrity.
We integrate advanced telescopic AGV handlers and IPC+PLC control systems to facilitate a fully unattended material flow. By automating the loading and unloading processes, we achieve a high throughput of 90 cassettes per hour, significantly reducing manual handling risks and improving fab productivity.
Optimized Cassette Performance
High-Capacity Smart Storage
We provide a high-density storage solution featuring 140 dedicated slots within a compact footprint. This automated configuration maximizes cleanroom space while ensuring rapid, organized access to high volumes of wafer cassettes.
Certified Cleanroom Protection
The systems feature an Aluminium Honey Comb external enclosure and integrated Fan Filter Units (FFU). This design ensures a strictly controlled Class 1k environment, minimizing particle generation and meeting stringent industrial standards.
Advanced Atmospheric Regulation
We maintain material stability through integrated nitrogen purging and CDA supply systems. This controlled atmosphere protects sensitive wafer cassettes from oxidation and moisture, ensuring consistent quality throughout the storage and retrieval cycle.
Intelligent Systems Integration
Our systems utilize a 17” touch screen interface and total network capability for real-time inventory tracking. This seamless integration allows for precise monitoring of every cassette, enhancing traceability and operational consistency across the production floor.
Technical Specifications

Dimension
Length – 6400mm
Width – 2350mm + 600 = 2950 (± 50mm)
Height – 3000mm
Capacity
140 slots
UPH
90 CASSETTES
Particle Control
Class 1k
FFU
Yes
AB Door
Yes
N2
Yes
User Interface
17’ Touch Screen Monitor & Keyboard
Enclosure (External)
Aluminium Honey Comb – Cleanroom Certified
Storage Sleeves (Internal)
Stainless Steel Sleeves
Power Requirements
240VAC Single Phase 13A
CDA Supply Pressure
0.5 to 0.6 Mpa (5 to 6 bar)
AGV Handler type
Telescopic Type
Control System
IPC + PLC
Network Capability
Yes



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