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Advanced Wafer Cassette ASRS Solutions

Automate the Buffer. Protect the Yield.

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UB Wafer Cassette ASRS is a high-performance automated storage system designed for the secure management of semiconductor cassettes. We utilize a Class 1k certified environment to protect delicate wafers from contamination, ensuring that every unit is stored under optimal conditions to maintain material integrity.

We integrate advanced telescopic AGV handlers and IPC+PLC control systems to facilitate a fully unattended material flow. By automating the loading and unloading processes, we achieve a high throughput of 90 cassettes per hour, significantly reducing manual handling risks and improving fab productivity.

Optimized Cassette Performance

High-Capacity Smart Storage

We provide a high-density storage solution featuring 140 dedicated slots within a compact footprint. This automated configuration maximizes cleanroom space while ensuring rapid, organized access to high volumes of wafer cassettes.

Certified Cleanroom Protection

The systems feature an Aluminium Honey Comb external enclosure and integrated Fan Filter Units (FFU). This design ensures a strictly controlled Class 1k environment, minimizing particle generation and meeting stringent industrial standards.

Advanced Atmospheric Regulation

We maintain material stability through integrated nitrogen purging and CDA supply systems. This controlled atmosphere protects sensitive wafer cassettes from oxidation and moisture, ensuring consistent quality throughout the storage and retrieval cycle.

Intelligent Systems Integration

Our systems utilize a 17” touch screen interface and total network capability for real-time inventory tracking. This seamless integration allows for precise monitoring of every cassette, enhancing traceability and operational consistency across the production floor.

Technical Specifications
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Dimension

Length – 6400mm

Width –  2350mm + 600 = 2950 (± 50mm)

Height –  3000mm

Capacity

 140 slots

UPH

90 CASSETTES

Particle Control

Class 1k 

FFU

Yes

AB Door

Yes

N2

Yes

User Interface

17’ Touch Screen Monitor & Keyboard

Enclosure (External)

Aluminium Honey Comb – Cleanroom Certified

Storage Sleeves (Internal)

Stainless Steel Sleeves

Power Requirements

240VAC Single Phase 13A

CDA Supply Pressure

0.5 to 0.6 Mpa (5 to 6 bar)

AGV Handler type

Telescopic Type

Control System

IPC + PLC

Network Capability

Yes

Semicon Stocker ASRS
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Magazine Handling

Our Stocker ASRS provides dedicated slots for magazines, ensuring secure transport and protection during high-frequency assembly processes.

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FOUP Storage

VEXTA manages Front Opening Unified Pods with precision, maintaining cleanroom standards for wafer transport and storage.

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Tray System Storage

Our automated trays organize diverse small components, utilizing vertical space to maximize storage density and accessibility.

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